Preparation and Investigation of Micro-Transfer-Printable Single-Crystalline InP Coupons for Heterogeneous Integration of III-V on Si

Preparation and Investigation of Micro-Transfer-Printable Single-Crystalline InP Coupons for Heterogeneous Integration of III-V on Si

New requirements for high-frequency applications in wireless communication and sensor technologies need III-V compound semiconductors such as indium phosphide (InP) to complement silicon (Si)-based technologies. This study establishes the basis for a new approach to heterogeneous integration of III-...

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Bibliographic Details
Main Authors: Isabella Peracchi, Carsten Richter, Tobias Schulz, Jens Martin, Albert Kwasniewski, Sebastian Kläger, Christiane Frank-Rotsch, Patrick Steglich, Karoline Stolze
Format: Article
Language:English
Published: MDPI AG 2023-07-01
Series:Crystals
Subjects:
indium phosphide
compound semiconductor crystals
III-V on Si
CMP
X-ray diffraction
rocking curve imaging
Online Access:https://www.mdpi.com/2073-4352/13/7/1126

Internet

https://www.mdpi.com/2073-4352/13/7/1126

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