Improving Optical and Electrical Properties of GaN Epitaxial Wafers and Enhancing Luminescent Properties of GaN-Based Light-Emitting-Diode with Excimer Laser Irradiation
The effect of KrF excimer laser irradiation on the optical and electrical properties of epitaxial wafers with a <i>p</i>-GaN surface were investigated at different laser energy densities and pulse numbers. The laser-irradiated samples were annealed in oxygen. The laser irradiation-induce...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-10-01
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Series: | Symmetry |
Subjects: | |
Online Access: | https://www.mdpi.com/2073-8994/13/10/1935 |