An Optimum Structure of Scalable Capacitors in 3D Crosspoint Memory Technology

Memory chips need large capacitors in their periphery to drive boosted word-lines and bit-lines for read and write operations. In a previous work, scalable capacitors were proposed for 3D crosspoint memory to keep the area for the capacitors constant over technology generations. This paper proposes...

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Bibliographic Details
Main Authors: Yuya Tone, Toru Tanzawa
Format: Article
Language:English
Published: MDPI AG 2021-11-01
Series:Electronics
Subjects:
Online Access:https://www.mdpi.com/2079-9292/10/22/2755