Experimental Study of See-Saw Mode Nano-Vibration on Orifice-Type Restrictors

Slide stability is key to the aerostatic guide in ultra-precise machines; thus, it has garnered plenty of attention. Macro-scale studies are commonplace, but micro- and nano-vibration issues require more attention. Microscope vibration is mainly caused by tiny changes in the fluid parameters of lubr...

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Bibliographic Details
Main Authors: Xiaoyan Shen, Jing Yu, Jianlong Yin, Dongsheng Li
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/11/11/5265