Electrically Active Defects in SiC Power MOSFETs

The performance and reliability of the state-of-the-art power 4H-SiC metal–oxide–semiconductor field-effect transistors (MOSFETs) are affected by electrically active defects at and near the interface between SiC and the gate dielectric. Specifically, these defects impact the channel-carrier mobility...

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Bibliographic Details
Main Authors: Mayank Chaturvedi, Daniel Haasmann, Hamid Amini Moghadam, Sima Dimitrijev
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Energies
Subjects:
Online Access:https://www.mdpi.com/1996-1073/16/4/1771