Overcoming the response instability of MoS2 humidity sensors by hydrochloric acid surface treatment
The synthesis of MoS2 with chemical vapor deposition (CVD) using sodium molybdate (Na2MoO4) as the Mo precursor produces a big number of large flakes (∼100-300 μm) compared to other CVD methods that use different precursors. In this work, humidity sensors based on MoS2 are developed, whereby MoS2 is...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-09-01
|
| Series: | Micro and Nano Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007223000461 |