DEVICE FOR INVESTIGATION OF MAGNETRON AND PULSED-LASER PLASMA
Various modifications of complex pulsed laser and magnetron deposition thin-film structures unit are presented. They include joint and separate variants of layer deposition. Unit realizes the plasma parameters control and enhances the possibility of laser-plasma and magnetron methods of coatings dep...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2015-04-01
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| Series: | Pribory i Metody Izmerenij |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/112 |