Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch

Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch

A microelectromechanical systems system (MEMS) electromagnetic swing-type actuator is proposed for an optical fiber switch in this paper. The actuator has a compact size of 5.1 × 5.1 × 5.3 mm<sup>3</sup>, consisting of two stators, a swing disc (rotator), a rotating shaft, and protective...

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Bibliographic Details
Main Authors: Shuhai Jia, Jun Peng, Jiaming Bian, Shuo Zhang, Shunjian Xu, Bao Zhang
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Micromachines
Subjects:
MEMS
electromagnetic driving
swing actuator
optical switch
Online Access:https://www.mdpi.com/2072-666X/12/2/221

Internet

https://www.mdpi.com/2072-666X/12/2/221

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