A Study of the Effect of the Fringe Fields on the Electrostatic Force in Vertical Comb Drives
The equation that describes the relationship between the applied voltage and the resulting electrostatic force within comb drives is often used to assist in choosing the dimensions for their design. This paper re-examines how some of these dimensions—particularly the cross-sectional dimensions of t...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2014-10-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/14/11/20149 |