Design of micromachines under uncertainty with the sample-average approximation method
Variability in the features produced by microfabrication processes, as well as uncertainty in some material properties, may cause a significant deviation in the performance of micromachines within the same fabrication run. Based on an estimation of the expected process variations, the design of such...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2024-02-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/18/2/18_2024jamdsm0018/_pdf/-char/en |