Damped superconducting structure for EUV light source based on energy recovery linac
A 10-kW-class high-power extreme ultraviolet light source is required in mass microfabrication technologies, and a free-electron laser based on an energy recovery linac (ERL) is an attractive candidate. The design beam current is 9.75 mA, and the beam energy is 800 MeV. The cavity design is required...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
American Physical Society
2023-12-01
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| Series: | Physical Review Accelerators and Beams |
| Online Access: | http://doi.org/10.1103/PhysRevAccelBeams.26.121601 |