Natural frequency reducing method of anti-vibration apparatus using an idea of variable structure system
In the field of precision positioning such as semiconductor exposure apparatus, vibration from the floor greatly influences the positioning accuracy. In order to prevent deterioration of accuracy, an anti-vibration apparatus is installed to isolate vibration. Along with high integration of semicondu...
| Main Authors: | , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2020-10-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/86/890/86_19-00349/_pdf/-char/en |