Thermal-annealing behavior of in-core neutron-irradiated epitaxial 4HSiC
The effect of thermal annealing on defect recovery of in-core neutron-irradiated 4HSiC was investigated. Au/SiC Schottky diodes were manufactured using a 4HSiC epitaxial wafer that was neutron-irradiated at the HANARO research reactor. The electrical characteristics of their epitaxial layers were...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2023-01-01
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Series: | Nuclear Engineering and Technology |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S1738573322004430 |