An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode

An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode

In this paper, we presented a novel electrostatic Roll/Pitch MEMS gyroscope with in-plane drive mode and out-of-plane sense mode. The proposed structure is developed based on a tuning fork gyroscope with decoupled sense mass on each tine that control the sense out-of-plane frequency. A multi-height...

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Bibliographic Details
Main Authors: Ahmed Khaled, Ahmed M. Salman, Nawaf S. Aljehani, Ibrahim F. Alzahem, Ridha S. Almikhlafi, Radwan M. Noor, Yasser M. Seddiq, Majed S. Alghamdi, Mostafa Soliman, Mohamed A. E. Mahmoud
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Sensors
Subjects:
MEMS
gyroscope
roll-pitch
ASIC
FEM
capacitive
Online Access:https://www.mdpi.com/1424-8220/22/3/702

Internet

https://www.mdpi.com/1424-8220/22/3/702

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