Optical and Mechanical Properties of Thin PTFE Films, Deposited from a Gas Phase
Abstract Thin polytetrafluoroethylene (PTFE) films are produced by deposition from a gas phase by two methods: electron‐enhanced vacuum deposition (EVD) and EVD + low‐temperature plasma (LTP). Structure, morphology, and composition of the films are studied by IR spectroscopy, atomic force microscopy...
Main Authors: | , , , , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Wiley-VCH
2023-06-01
|
Series: | Macromolecular Materials and Engineering |
Subjects: | |
Online Access: | https://doi.org/10.1002/mame.202200617 |