PRECISION MOTION SYSTEM FOR OPTO-MECHANICAL EQUIPMENT OF MICROELECTRONICS
The paper proposes a structure of precision motion system built on the basis of a circular multi-coordinate synchronous segment motor and reconfigurable parallel kinematic mechanism. The multi-coordinate synchronous segment motor may have from two to six movable segments depending on the design, and...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Belarusian National Technical University
2015-08-01
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| Series: | Nauka i Tehnika |
| Subjects: | |
| Online Access: | https://sat.bntu.by/jour/article/view/848 |