PRECISION MOTION SYSTEM FOR OPTO-MECHANICAL EQUIPMENT OF MICROELECTRONICS

PRECISION MOTION SYSTEM FOR OPTO-MECHANICAL EQUIPMENT OF MICROELECTRONICS

The paper proposes a structure of precision motion system built on the basis of a circular multi-coordinate synchronous segment motor and reconfigurable parallel kinematic mechanism. The multi-coordinate synchronous segment motor may have from two to six movable segments depending on the design, and...

书目详细资料
Main Authors:	I. V. Dainiak, S. E. Karpovich, N. I. Kekish, L. Goldyn
格式:	文件
语言:	Russian
出版:	Belarusian National Technical University 2015-08-01
丛编:	Наука и техника
主题:	precision motion system segment motor parallel kinematic mechanism opto-mechanical equipment
在线阅读:	https://sat.bntu.by/jour/article/view/848

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