Ion beam profiling from the interaction with a freestanding 2D layer

Ion beam profiling from the interaction with a freestanding 2D layer

Recent years have seen a great potential of the focused ion beam (FIB) technology for the nanometer-scale patterning of a freestanding two-dimensional (2D) layer. Experimentally determined sputtering yields of the perforation process can be quantitatively explained using the binary collision theory....

Full description

Bibliographic Details
Main Authors: Ivan Shorubalko, Kyoungjun Choi, Michael Stiefel, Hyung Gyu Park
Format: Article
Language:English
Published: Beilstein-Institut 2017-03-01
Series:Beilstein Journal of Nanotechnology
Subjects:
exposure dose
focused ion beam
freestanding 2D layer
graphene
ion beam diameter
ion beam point spread function
Online Access:https://doi.org/10.3762/bjnano.8.73

Internet

https://doi.org/10.3762/bjnano.8.73

Similar Items