Nitrogen-doped Carbon-based Very Thin Film on Quartz or Sapphire Substrate as Back-side Illuminated Transmission Photocathode
Nitrogen-doped carbon-based very thin films were deposited on quartz or sapphire substrate by RF reactive magnetron sputtering using carbon target and gas mixture of Ar and reactive gases N2 or N2+H2. The concentration of elements in the films was determined by RBS and ERD analytical method simultan...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2019-07-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/july_2019/Vol_235/P_3093.pdf |