Damage-free LED lithography for atomically thin 2D material devices

Damage-free LED lithography for atomically thin 2D material devices

Abstract Desired electrode patterning on two-dimensional (2D) materials is a foremost step for realizing the full potentials of 2D materials in electronic devices. Here, we introduce an approach for damage-free, on-demand manufacturing of 2D material devices using light-emitting diode (LED) lithogra...

Full description

Bibliographic Details
Main Authors: Yue Shi, Takaaki Taniguchi, Ki-Nam Byun, Daiki Kurimoto, Eisuke Yamamoto, Makoto Kobayashi, Kazuhito Tsukagoshi, Minoru Osada
Format: Article
Language:English
Published: Nature Portfolio 2023-02-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-023-29281-w

Internet

https://doi.org/10.1038/s41598-023-29281-w

Similar Items