Al<sub>1−x</sub>Sc<sub>x</sub>N Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion

Al<sub>1−x</sub>Sc<sub>x</sub>N Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion

Ferroelectric thin films of wurtzite-type aluminum scandium nitride (Al<sub>1−x</sub>Sc<sub>x</sub>N) are promising candidates for non-volatile memory applications and high-temperature sensors due to their outstanding functional and thermal stability exceeding most other ferr...

Full description

Bibliographic Details
Main Authors: Niklas Wolff, Md Redwanul Islam, Lutz Kirste, Simon Fichtner, Fabian Lofink, Agnė Žukauskaitė, Lorenz Kienle
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Micromachines
Subjects:
aluminum scandium nitride
thermal stability
structure analysis
X-ray diffraction
ferroelectrics
Online Access:https://www.mdpi.com/2072-666X/13/8/1282

Internet

https://www.mdpi.com/2072-666X/13/8/1282

Similar Items