An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method
This work presents a novel and compact method for simultaneously measuring errors in linear displacement and vertical straightness of a moving linear air-bearing stage using 3D sinusoidal-groove linear reflective grating and a novel triangular wave-based sequence signal analysis method. The new sche...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-06-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/19/12/2816 |