Numerical Study of Nanoparticle Deposition in a Gaseous Microchannel under the Influence of Various Forces
Nanoparticle deposition in microchannel devices inducing contaminant clogging is a serious barrier to the application of micro-electro-mechanical systems (MEMS). For micro-scale gas flow fields with a high Knudsen number (<i>Kn</i>) in the microchannel, gas rarefaction and velocity slip...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/1/47 |