Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

The performance of microelectromechanical system (MEMS) inertial measurement units (IMUs) is susceptible to many environmental factors. Among different factors, temperature is one of the most challenging issues. This report reveals the bias stability analysis of an ovenized MEMS gyroscope. A micro-h...

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Bibliographic Details
Main Authors: Hussamud Din, Faisal Iqbal, Jiwon Park, Byeungleul Lee
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Sensors
Subjects:
bias stability
gyroscope
inertial sensors
MEMS
micro-oven
temperature compensation
Online Access:https://www.mdpi.com/1424-8220/23/1/256

Internet

https://www.mdpi.com/1424-8220/23/1/256

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