Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System
The performance of microelectromechanical system (MEMS) inertial measurement units (IMUs) is susceptible to many environmental factors. Among different factors, temperature is one of the most challenging issues. This report reveals the bias stability analysis of an ovenized MEMS gyroscope. A micro-h...
Main Authors: | Hussamud Din, Faisal Iqbal, Jiwon Park, Byeungleul Lee |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-12-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/23/1/256 |
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