DESENVOLVIMENTO DE UM EQUIPAMENTO DE SPIN COATING COM SISTEMA DE FIXAÇÃO DE SUBSTRATO A VÁCUO EMPREGANDO MATERIAIS REUTILIZADOS
This work presents the development of a low-cost spin coater for thin film deposition as an alternative to commercial equipment that have high acquisition cost. The proposed spin coater uses a brushless motor taken from an unused hard disk, which is activated through the association of an electronic...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Sociedade Brasileira de Química
2023-06-01
|
| Series: | Química Nova |
| Online Access: | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S0100-40422023000500470&tlng=pt |