Surface treatment by the ion flow from electron beam generated plasma in the forevacuum pressure range
The paper presents research results of peculiarities of gas ion flows usage and their generation from large plasma formation (>50 sq.cm) obtained by electron beam ionization of gas in the forevacuum pressure range. An upgraded source was used for electron beam generation, which allowed obtaining...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201714303008 |