FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure

FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure

A Finite Element Method (FEM) simulation study is conducted, aiming to scrutinize the sensitivity of Sezawa wave mode in a multilayer AlN/SiO2/Si Surface Acoustic Wave (SAW) sensor to low concentrations of Volatile Organic Compounds (VOCs), that is, trichloromethane, trichloroethylene, carbon tetrac...

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Bibliographic Details
Main Authors: Muhammad Zubair Aslam, Varun Jeoti, Saravanan Karuppanan, Aamir Farooq Malik, Asif Iqbal
Format: Article
Language:English
Published: MDPI AG 2018-05-01
Series:Sensors
Subjects:
AlN
FEM simulation
Sezawa mode
VOC
Online Access:http://www.mdpi.com/1424-8220/18/6/1687

Internet

http://www.mdpi.com/1424-8220/18/6/1687

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