The Combined Spectral Response of a MEMS Metamaterial Absorber for the Mid-IR and Its Sub-Wavelength Fabrication Residual Array of Holes
Metasurface coatings on a free-standing SiN thin film membrane are fabricated on a Si substrate using masked lithography and CMOS-compatible surface micromachining. The result is a band-limited absorber for the mid-IR, which is part of a microstructure that is attached to the substrate by long and s...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-06-01
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| Series: | Materials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1944/16/12/4278 |