The Combined Spectral Response of a MEMS Metamaterial Absorber for the Mid-IR and Its Sub-Wavelength Fabrication Residual Array of Holes

The Combined Spectral Response of a MEMS Metamaterial Absorber for the Mid-IR and Its Sub-Wavelength Fabrication Residual Array of Holes

Metasurface coatings on a free-standing SiN thin film membrane are fabricated on a Si substrate using masked lithography and CMOS-compatible surface micromachining. The result is a band-limited absorber for the mid-IR, which is part of a microstructure that is attached to the substrate by long and s...

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Bibliographic Details
Main Authors: Reinoud F. Wolffenbuttel, M. Amir Ghaderi
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Materials
Subjects:
metamaterial absorber
surface micromachining
CMOS compatibility
under-etched metasurface
Online Access:https://www.mdpi.com/1996-1944/16/12/4278

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