Substrate bias effects on cathodic arc deposited Cr coatings
We investigate the effects of substrate bias on cathodic arc deposition of Cr coatings without external substrate heating at four different substrate bias levels, floating, −30, −50, and −70 V. After 10 min of deposition, the substrate temperature reaches 180, 210, 230, and 260 °C for floating poten...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-09-01
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| Series: | Results in Materials |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590048X23000882 |