Substrate bias effects on cathodic arc deposited Cr coatings
We investigate the effects of substrate bias on cathodic arc deposition of Cr coatings without external substrate heating at four different substrate bias levels, floating, −30, −50, and −70 V. After 10 min of deposition, the substrate temperature reaches 180, 210, 230, and 260 °C for floating poten...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-09-01
|
| Series: | Results in Materials |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590048X23000882 |
| _version_ | 1797682978526068736 |
|---|---|
| author | Johan Nyman Muhammad Junaid Niklas Sarius Jens Birch Sören Kahl Hans Högberg |
| author_facet | Johan Nyman Muhammad Junaid Niklas Sarius Jens Birch Sören Kahl Hans Högberg |
| author_sort | Johan Nyman |
| collection | DOAJ |
| description | We investigate the effects of substrate bias on cathodic arc deposition of Cr coatings without external substrate heating at four different substrate bias levels, floating, −30, −50, and −70 V. After 10 min of deposition, the substrate temperature reaches 180, 210, 230, and 260 °C for floating potential, −30, −50, and −70 V, respectively. Time-of-flight energy elastic recoil detection analysis shows that all grown coatings are of high purity, with no coating containing more than 0.2 at.% of C and/or O. Increasing the substrate bias also reduces the number of macroparticles, steers the texture from preferred [110]- to [100]-orientation and induces a residual compressive stress of ∼450 MPa in the coatings. The hardness of the coatings remains at a constant 7.5 GPa irrespective of the substrate bias. The four-point probe resistivity of the grown coatings is 15–17 μΩcm regardless of substrate bias, close to the 12.9 μΩcm of bulk Cr. |
| first_indexed | 2024-03-12T00:08:46Z |
| format | Article |
| id | doaj.art-066068f155b94855b9acd34a43e59c03 |
| institution | Directory Open Access Journal |
| issn | 2590-048X |
| language | English |
| last_indexed | 2024-03-12T00:08:46Z |
| publishDate | 2023-09-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Results in Materials |
| spelling | doaj.art-066068f155b94855b9acd34a43e59c032023-09-16T05:31:37ZengElsevierResults in Materials2590-048X2023-09-0119100450Substrate bias effects on cathodic arc deposited Cr coatingsJohan Nyman0Muhammad Junaid1Niklas Sarius2Jens Birch3Sören Kahl4Hans Högberg5Department of Physics, Chemistry and Biology (IFM) Linköping University, SE-581 83, Linköping, Sweden; Husqvarna AB, SE-561 82, Huskvarna, Sweden; Corresponding author. Department of Physics, Chemistry and Biology (IFM) Linköping University, SE-581 83, Linköping, Sweden.Husqvarna AB, SE-561 82, Huskvarna, SwedenHusqvarna AB, SE-561 82, Huskvarna, SwedenDepartment of Physics, Chemistry and Biology (IFM) Linköping University, SE-581 83, Linköping, SwedenHusqvarna AB, SE-561 82, Huskvarna, SwedenDepartment of Physics, Chemistry and Biology (IFM) Linköping University, SE-581 83, Linköping, SwedenWe investigate the effects of substrate bias on cathodic arc deposition of Cr coatings without external substrate heating at four different substrate bias levels, floating, −30, −50, and −70 V. After 10 min of deposition, the substrate temperature reaches 180, 210, 230, and 260 °C for floating potential, −30, −50, and −70 V, respectively. Time-of-flight energy elastic recoil detection analysis shows that all grown coatings are of high purity, with no coating containing more than 0.2 at.% of C and/or O. Increasing the substrate bias also reduces the number of macroparticles, steers the texture from preferred [110]- to [100]-orientation and induces a residual compressive stress of ∼450 MPa in the coatings. The hardness of the coatings remains at a constant 7.5 GPa irrespective of the substrate bias. The four-point probe resistivity of the grown coatings is 15–17 μΩcm regardless of substrate bias, close to the 12.9 μΩcm of bulk Cr.http://www.sciencedirect.com/science/article/pii/S2590048X23000882Chromium coatingsCathodic arc depositionSubstrate biasStressHardness |
| spellingShingle | Johan Nyman Muhammad Junaid Niklas Sarius Jens Birch Sören Kahl Hans Högberg Substrate bias effects on cathodic arc deposited Cr coatings Results in Materials Chromium coatings Cathodic arc deposition Substrate bias Stress Hardness |
| title | Substrate bias effects on cathodic arc deposited Cr coatings |
| title_full | Substrate bias effects on cathodic arc deposited Cr coatings |
| title_fullStr | Substrate bias effects on cathodic arc deposited Cr coatings |
| title_full_unstemmed | Substrate bias effects on cathodic arc deposited Cr coatings |
| title_short | Substrate bias effects on cathodic arc deposited Cr coatings |
| title_sort | substrate bias effects on cathodic arc deposited cr coatings |
| topic | Chromium coatings Cathodic arc deposition Substrate bias Stress Hardness |
| url | http://www.sciencedirect.com/science/article/pii/S2590048X23000882 |
| work_keys_str_mv | AT johannyman substratebiaseffectsoncathodicarcdepositedcrcoatings AT muhammadjunaid substratebiaseffectsoncathodicarcdepositedcrcoatings AT niklassarius substratebiaseffectsoncathodicarcdepositedcrcoatings AT jensbirch substratebiaseffectsoncathodicarcdepositedcrcoatings AT sorenkahl substratebiaseffectsoncathodicarcdepositedcrcoatings AT hanshogberg substratebiaseffectsoncathodicarcdepositedcrcoatings |