Modulation and Refinement of In–N re-Bonding of InGaN Through in Post-Flow During a Refined Temper Fire Treatment Process

Modulation and Refinement of In–N re-Bonding of InGaN Through in Post-Flow During a Refined Temper Fire Treatment Process

In this article, we describe a subtle method for modulating and refining the indium-nitrogen (In-N) re-bonding effect of InGaN by employing an In post-flow during temper fire (ΔT = 110°C) treatment. After optimizing the In flow rate and the temper fire treatment process, the In...

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Bibliographic Details
Main Authors: Tsung-Yen Liu, Lung-Chien Chen, Cheng-Che Lee, Yu Cheng, Chieh-Hsiung Kuan, Ray-Ming Lin
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
GaN
InGaN-based green LEDs
Indium–nitrogen re-bonding
refinement
metal–organic vapor phase epitaxy
Online Access:https://ieeexplore.ieee.org/document/9296228/

Internet

https://ieeexplore.ieee.org/document/9296228/

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