The effect and mechanism for doping concentration of Mg-Hf on the piezoelectric properties for AlN
The piezoelectric coefficient of intrinsic AlN is not meeting the demand from some high-performance applications in MEMS compared with the commercialized piezoelectric ceramics. Therefore, we conducted a first principles calculation investigation of the piezoelectric properties of Mg-Hf co-doped AlN...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2023-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/acda13 |