Study on the Surface Morphology of Micro-Particles and the Oxide Layer on Silicon Carbide Crystal Using Nanosecond Green Laser Cleaning Assisted with Airflow
With a focus on the particle pollutants on the surface of silicon carbide crystal materials, this paper establishes a laser cleaning model for the fine particles found in silicon carbide crystal materials and proposes a new nanosecond green laser cleaning method assisted by airflow, which can effect...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-12-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/12/12/1788 |