Metal-Semiconductor-Metal GeSn Photodetectors on Silicon for Short-Wave Infrared Applications

Metal-semiconductor-metal photodetectors (MSM PDs) are effective for monolithic integration with other optical components of the photonic circuits because of the planar fabrication technique. In this article, we present the design, growth, and characterization of GeSn MSM PDs that are suitable for p...

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Main Authors: Soumava Ghosh, Kuan-Chih Lin, Cheng-Hsun Tsai, Harshvardhan Kumar, Qimiao Chen, Lin Zhang, Bongkwon Son, Chuan Seng Tan, Munho Kim, Bratati Mukhopadhyay, Guo-En Chang
Format: Article
Language:English
Published: MDPI AG 2020-08-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/11/9/795
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author Soumava Ghosh
Kuan-Chih Lin
Cheng-Hsun Tsai
Harshvardhan Kumar
Qimiao Chen
Lin Zhang
Bongkwon Son
Chuan Seng Tan
Munho Kim
Bratati Mukhopadhyay
Guo-En Chang
author_facet Soumava Ghosh
Kuan-Chih Lin
Cheng-Hsun Tsai
Harshvardhan Kumar
Qimiao Chen
Lin Zhang
Bongkwon Son
Chuan Seng Tan
Munho Kim
Bratati Mukhopadhyay
Guo-En Chang
author_sort Soumava Ghosh
collection DOAJ
description Metal-semiconductor-metal photodetectors (MSM PDs) are effective for monolithic integration with other optical components of the photonic circuits because of the planar fabrication technique. In this article, we present the design, growth, and characterization of GeSn MSM PDs that are suitable for photonic integrated circuits. The introduction of 4% Sn in the GeSn active region also reduces the direct bandgap and shows a redshift in the optical responsivity spectra, which can extend up to 1800 nm wavelength, which means it can cover the entire telecommunication bands. The spectral responsivity increases with an increase in bias voltage caused by the high electric field, which enhances the carrier generation rate and the carrier collection efficiency. Therefore, the GeSn MSM PDs can be a suitable device for a wide range of short-wave infrared (SWIR) applications.
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spelling doaj.art-076c06f7b1934a2693e49d1ef2b7c35e2023-11-20T10:58:44ZengMDPI AGMicromachines2072-666X2020-08-0111979510.3390/mi11090795Metal-Semiconductor-Metal GeSn Photodetectors on Silicon for Short-Wave Infrared ApplicationsSoumava Ghosh0Kuan-Chih Lin1Cheng-Hsun Tsai2Harshvardhan Kumar3Qimiao Chen4Lin Zhang5Bongkwon Son6Chuan Seng Tan7Munho Kim8Bratati Mukhopadhyay9Guo-En Chang10Department of Mechanical Engineering, and Advanced Institute of Manufacturing with High-Tech Innovations (AIM-HI), National Chung Cheng University, Chiyai County 62102, TaiwanGraduate Institute of Opto-Mechatronics, National Chung Cheng University, Chiyai County 62102, TaiwanGraduate Institute of Opto-Mechatronics, National Chung Cheng University, Chiyai County 62102, TaiwanDepartment of Mechanical Engineering, and Advanced Institute of Manufacturing with High-Tech Innovations (AIM-HI), National Chung Cheng University, Chiyai County 62102, TaiwanSchool of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, SingaporeSchool of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, SingaporeSchool of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, SingaporeSchool of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, SingaporeSchool of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, SingaporeInstitute of Radio Physics and Electronics, University of Calcutta, Kolkata 700009, IndiaDepartment of Mechanical Engineering, and Advanced Institute of Manufacturing with High-Tech Innovations (AIM-HI), National Chung Cheng University, Chiyai County 62102, TaiwanMetal-semiconductor-metal photodetectors (MSM PDs) are effective for monolithic integration with other optical components of the photonic circuits because of the planar fabrication technique. In this article, we present the design, growth, and characterization of GeSn MSM PDs that are suitable for photonic integrated circuits. The introduction of 4% Sn in the GeSn active region also reduces the direct bandgap and shows a redshift in the optical responsivity spectra, which can extend up to 1800 nm wavelength, which means it can cover the entire telecommunication bands. The spectral responsivity increases with an increase in bias voltage caused by the high electric field, which enhances the carrier generation rate and the carrier collection efficiency. Therefore, the GeSn MSM PDs can be a suitable device for a wide range of short-wave infrared (SWIR) applications.https://www.mdpi.com/2072-666X/11/9/795photodetectorsGeSn alloyssilicon photonicsphotonic integrated circuits
spellingShingle Soumava Ghosh
Kuan-Chih Lin
Cheng-Hsun Tsai
Harshvardhan Kumar
Qimiao Chen
Lin Zhang
Bongkwon Son
Chuan Seng Tan
Munho Kim
Bratati Mukhopadhyay
Guo-En Chang
Metal-Semiconductor-Metal GeSn Photodetectors on Silicon for Short-Wave Infrared Applications
Micromachines
photodetectors
GeSn alloys
silicon photonics
photonic integrated circuits
title Metal-Semiconductor-Metal GeSn Photodetectors on Silicon for Short-Wave Infrared Applications
title_full Metal-Semiconductor-Metal GeSn Photodetectors on Silicon for Short-Wave Infrared Applications
title_fullStr Metal-Semiconductor-Metal GeSn Photodetectors on Silicon for Short-Wave Infrared Applications
title_full_unstemmed Metal-Semiconductor-Metal GeSn Photodetectors on Silicon for Short-Wave Infrared Applications
title_short Metal-Semiconductor-Metal GeSn Photodetectors on Silicon for Short-Wave Infrared Applications
title_sort metal semiconductor metal gesn photodetectors on silicon for short wave infrared applications
topic photodetectors
GeSn alloys
silicon photonics
photonic integrated circuits
url https://www.mdpi.com/2072-666X/11/9/795
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