Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon
Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characterist...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-05-01
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| Series: | Journal of Advanced Research |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2090123220302551 |