Improved MSRN-Based Attention Block for Mask Alignment Mark Detection in Photolithography
Wafer chips are manufactured in the semiconductor industry through various process technologies. Photolithography is one of these processes, aligning the wafer and scanning the circuit pattern on the wafer on which the photoresist film is formed by irradiating light onto the circuit pattern drawn on...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-03-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/12/5/2721 |