Excimer Laser Surface Patterning for Photoluminescence Enhancement of Silicon Nanocrystals

A method for enhancing the photoluminescence of silicon nanocrystals in a silicon oxide matrix by fabrication of periodic surface structures through laser irradiation is demonstrated. ArF excimer lasers are used to produce periodic line structures by material ablation. Photoluminescence, Raman, and...

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Bibliographic Details
Main Authors: Lukas Janos Richter, Ulrich Ross, Michael Seibt, Jürgen Ihlemann
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Photonics
Subjects:
Online Access:https://www.mdpi.com/2304-6732/10/4/358