A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors
We demonstrate an experimental assessment of a high-Q, high-angle piezoelectric (2 µm PZT) MEMS scanning micromirror featuring distributed backside reinforcement, suitable for applications demanding energy-efficient and high-quality image projection. Frequency response measurements at 10 different v...
| Main Authors: | , , , , , , , |
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| 格式: | 文件 |
| 语言: | English |
| 出版: |
MDPI AG
2024-04-01
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| 丛编: | Proceedings |
| 主题: | |
| 在线阅读: | https://www.mdpi.com/2504-3900/97/1/144 |