A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors

A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors

We demonstrate an experimental assessment of a high-Q, high-angle piezoelectric (2 µm PZT) MEMS scanning micromirror featuring distributed backside reinforcement, suitable for applications demanding energy-efficient and high-quality image projection. Frequency response measurements at 10 different v...

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Bibliographic Details
Main Authors: Clement Fleury, Markus Bainschab, Gianluca Mendicino, Roberto Carminati, Pooja Thakkar, Dominik Holzmann, Sara Guerreiro, Adrien Piot
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Proceedings
Subjects:
MEMS
scanning micromirror
air damping
dynamic deformation
Online Access:https://www.mdpi.com/2504-3900/97/1/144

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https://www.mdpi.com/2504-3900/97/1/144

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