Tuning Metasurface Dimensions by Soft Nanoimprint Lithography and Reactive Ion Etching

Tuning Metasurface Dimensions by Soft Nanoimprint Lithography and Reactive Ion Etching

Metasurfaces are ultrathin and flat layers of subwavelength nanostructures composed of metallic or high‐refractive‐index materials. They can alter lightwave properties effectively and show significant application potential in various nanophotonic technologies. The subwavelength meta‐atoms are genera...

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Bibliographic Details
Main Authors: Xinyi Cao, Yibo Xiao, Qiao Dong, Shaobo Zhang, Junzhuan Wang, Lianhui Wang, Li Gao
Format: Article
Language:English
Published: Wiley-VCH 2022-11-01
Series:Advanced Photonics Research
Subjects:
metasurfaces
nanophotonics
plasmonics
reactive ion etching
soft nanoimprint lithography
Online Access:https://doi.org/10.1002/adpr.202200127

Internet

https://doi.org/10.1002/adpr.202200127

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