A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes

A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes

MEMS gyroscopes play an important role in inertial navigation measurements, which mainly works in <i>n</i> = 2 mode. However, mode matching is the basis for high-precision detection, which can improve the sensitivity, resolution, and signal-to-noise ratio of the gyroscopes. An initial fr...

Full description

Bibliographic Details
Main Authors: Chuanfu Chen, Kai Wu, Kuo Lu, Qingsong Li, Chengxiang Wang, Xuezhong Wu, Beizhen Wang, Dingbang Xiao
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Micromachines
Subjects:
ring MEMS gyroscopes
mass-stiffness decoupling
frequency split
femtosecond laser
frequency tuning
Online Access:https://www.mdpi.com/2072-666X/13/7/1052

Internet

https://www.mdpi.com/2072-666X/13/7/1052

Similar Items