Deformation Analysis and Optimal Design of Membrane for Differential Pressure Capacitance Sensor

The compression deformation of the measuring membrane of the differential pressure capacitance sensor is studied. The classical von Kármán thin plate theory is applied to the elastic circular thin plate subjected to pretension, and the approximate analytical solution is given by adopting the homotop...

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Bibliographic Details
Main Author: ZHAO Zhao, LEI Huaming
Format: Article
Language:zho
Published: Editorial Office of Journal of Shanghai Jiao Tong University 2023-03-01
Series:Shanghai Jiaotong Daxue xuebao
Subjects:
Online Access:https://xuebao.sjtu.edu.cn/article/2023/1006-2467/1006-2467-57-3-264.shtml