Plasma-enhanced chemical vapor deposition of graphene on copper substrates

A plasma enhanced vapor deposition process is used to synthesize graphene from a hydrogen/methane gas mixture on copper samples. The graphene samples were transferred onto SiO2 substrates and characterized by Raman spectroscopic mapping and atomic force microscope topographical mapping. Analysis of...

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Bibliographic Details
Main Authors: Nicolas Woehrl, Oliver Ochedowski, Steven Gottlieb, Kosuke Shibasaki, Stephan Schulz
Format: Article
Language:English
Published: AIP Publishing LLC 2014-04-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4873157