Plasma-enhanced chemical vapor deposition of graphene on copper substrates
A plasma enhanced vapor deposition process is used to synthesize graphene from a hydrogen/methane gas mixture on copper samples. The graphene samples were transferred onto SiO2 substrates and characterized by Raman spectroscopic mapping and atomic force microscope topographical mapping. Analysis of...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2014-04-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.4873157 |