Experimental Study and Simulation of Pull-In Behavior in Hybrid Levitation Microactuator for Square-Shaped Proof Masses

Experimental Study and Simulation of Pull-In Behavior in Hybrid Levitation Microactuator for Square-Shaped Proof Masses

This paper presents the results of a comprehensive study of the pull-in phenomenon in the hybrid levitation microactuator (HLMA), in which square-shaped proof masses (PMs) of different sizes, namely, length sides of 2.8 and 3.2 mm and thicknesses of 25 and 10 μm were electromagnetically levitated. T...

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Bibliographic Details
Main Authors: Emil R. Mamleyev, Chun Him Lee, Jan G. Korvink, Manfred Kohl, Kirill V. Poletkin
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Actuators
Subjects:
microactuators
electromagnetic levitation
pull-in
finite element method
modeling
Online Access:https://www.mdpi.com/2076-0825/12/2/48

Internet

https://www.mdpi.com/2076-0825/12/2/48

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