Features of the Influence of the Arrangement of Parts in the Chamber of Installation During Vacuum Arc Deposition on the Properties of Coatings

Features of the Influence of the Arrangement of Parts in the Chamber of Installation During Vacuum Arc Deposition on the Properties of Coatings

The effect of the spatial arrangement in the physical vapor deposition (PVD) chamber on the composition and properties of coatings is considered using the example of the deposition of the (Ti,Al)N coating. The proposed method is one of the ways (along with varying the arc current of the cathodes and...

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Bibliographic Details
Main Authors: Catherine Sotova, Marina Volosova, Alexey Vereschaka, Yuri Bublikov, Filipp Milovich, Anton Seleznev, Ilya Shmakov, Sergey Grigoriev
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Applied Sciences
Subjects:
PVD coatings
spatial arrangement
content of elements
hardness
scratch test
nitriding
Online Access:https://www.mdpi.com/2076-3417/14/22/10634

Internet

https://www.mdpi.com/2076-3417/14/22/10634

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