Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies
In this Perspective article, we evaluate the current state of research on the use of focused electron and ion beams to directly fabricate nanoscale superconducting devices with application in quantum technologies. First, the article introduces the main superconducting devices and their fabrication b...
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| Format: | Article |
| Language: | English |
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IOP Publishing
2023-01-01
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| Series: | Materials for Quantum Technology |
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| Online Access: | https://doi.org/10.1088/2633-4356/acbefb |