Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies
In this Perspective article, we evaluate the current state of research on the use of focused electron and ion beams to directly fabricate nanoscale superconducting devices with application in quantum technologies. First, the article introduces the main superconducting devices and their fabrication b...
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| Format: | Article |
| Language: | English |
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IOP Publishing
2023-01-01
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| Series: | Materials for Quantum Technology |
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| Online Access: | https://doi.org/10.1088/2633-4356/acbefb |
| _version_ | 1797844572181626880 |
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| author | José María De Teresa |
| author_facet | José María De Teresa |
| author_sort | José María De Teresa |
| collection | DOAJ |
| description | In this Perspective article, we evaluate the current state of research on the use of focused electron and ion beams to directly fabricate nanoscale superconducting devices with application in quantum technologies. First, the article introduces the main superconducting devices and their fabrication by means of standard lithography techniques such as optical lithography and electron beam lithography. Then, focused ion beam patterning of superconductors through milling or irradiation is shown, as well as the growth of superconducting devices by means of focused electron and ion beam induced deposition. We suggest that the key benefits of these resist-free direct-growth techniques for quantum technologies include the ability to make electrical nanocontacts and circuit edit, fabrication of high-resolution superconducting resonators, creation of Josephson junctions and superconducting quantum interference device (SQUIDs) for on-tip sensors, patterning of high-Tc SQUIDs and other superconducting circuits, and the exploration of fluxtronics and topological superconductivity. |
| first_indexed | 2024-04-09T17:24:29Z |
| format | Article |
| id | doaj.art-095369c4bf064383b7a09a262c49820f |
| institution | Directory Open Access Journal |
| issn | 2633-4356 |
| language | English |
| last_indexed | 2024-04-09T17:24:29Z |
| publishDate | 2023-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | Materials for Quantum Technology |
| spelling | doaj.art-095369c4bf064383b7a09a262c49820f2023-04-18T13:53:10ZengIOP PublishingMaterials for Quantum Technology2633-43562023-01-013101300110.1088/2633-4356/acbefbNanoscale direct-write fabrication of superconducting devices for application in quantum technologiesJosé María De Teresa0https://orcid.org/0000-0001-9566-0738Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza , Zaragoza 50009, Spain; Laboratorio de Microscopías Avanzadas (LMA), Universidad de Zaragoza , Zaragoza 50018, SpainIn this Perspective article, we evaluate the current state of research on the use of focused electron and ion beams to directly fabricate nanoscale superconducting devices with application in quantum technologies. First, the article introduces the main superconducting devices and their fabrication by means of standard lithography techniques such as optical lithography and electron beam lithography. Then, focused ion beam patterning of superconductors through milling or irradiation is shown, as well as the growth of superconducting devices by means of focused electron and ion beam induced deposition. We suggest that the key benefits of these resist-free direct-growth techniques for quantum technologies include the ability to make electrical nanocontacts and circuit edit, fabrication of high-resolution superconducting resonators, creation of Josephson junctions and superconducting quantum interference device (SQUIDs) for on-tip sensors, patterning of high-Tc SQUIDs and other superconducting circuits, and the exploration of fluxtronics and topological superconductivity.https://doi.org/10.1088/2633-4356/acbefbquantum technologiessuperconducting devicesfocused ion beamfocused electron beam induced depositionfocused ion beam induced deposition |
| spellingShingle | José María De Teresa Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies Materials for Quantum Technology quantum technologies superconducting devices focused ion beam focused electron beam induced deposition focused ion beam induced deposition |
| title | Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies |
| title_full | Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies |
| title_fullStr | Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies |
| title_full_unstemmed | Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies |
| title_short | Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies |
| title_sort | nanoscale direct write fabrication of superconducting devices for application in quantum technologies |
| topic | quantum technologies superconducting devices focused ion beam focused electron beam induced deposition focused ion beam induced deposition |
| url | https://doi.org/10.1088/2633-4356/acbefb |
| work_keys_str_mv | AT josemariadeteresa nanoscaledirectwritefabricationofsuperconductingdevicesforapplicationinquantumtechnologies |