Two-step treatment to obtain single-terminated SrTiO3 substrate and the related difference in both LaAlO3 film growth and electronic property
A two-step treatment, first chemical etching then thermal treatment, is proposed to achieve an atomically flat and thermally stable TiO2-terminated SrTiO3 substrate. LaAlO3 films were then grown on those TiO2-terminated and as-received substrates. LaAlO3 films on the TiO2-terminated SrTiO3 substrate...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-08-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0053323 |